Generally considered the most efficient cryopump design the 10” ANSI / 14” OD Conflat achieving double the gas and water volume of the CP-8 cryopump, providing clean, oil free high vacuum pumping solutions. .
Standard applications: Semiconductor, Aerospace & vacuum coating as well as R&D.
|
| Parameter |
|
|
| Cryo-Plex 10 - Gas pumping speeds liters/second |
|
| Air |
3,000 |
| Water |
9,000 |
| Hydrogen |
5,000 |
| Argon |
2,500 |
| Gas capacities - standard liters @ 5x10-6 Torr |
|
| Hydrogen |
24 |
| Argon |
2,000 |
| Throughput |
|
| Argon sccm |
1,500 |
| Crossover |
|
| Torr-liters |
300 |
| Cool down time |
|
| 60 Hertz |
60 Min |
| Cryopump measurements |
|
| Height |
23.9" |
| Weight LBS |
85 |
| Inlet flange |
ANSI/ISO/CF |
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