Standard cryopump in use on larger box-coating systems, space simulation chambers, electron beam coating systems requiring clean, oil free high vacuum pumping solutions
|
| Parameter |
|
|
| Cryo-Plex 16 - Gas pumping speeds liters/second |
|
| Air |
5,000 |
| Water |
16,000 |
| Hydrogen |
5,000 |
| Argon |
4,200 |
| Gas capacities - standard liters @ 5x10-6 Torr |
|
| Hydrogen |
15 |
| Argon |
2,500 |
| Throughput |
|
| Argon sccm |
500 |
| Crossover |
|
| Torr-liters |
300 |
| Cool down time |
|
| 60 Hertz |
120 Min |
| Cryopump measurements |
|
| Height |
24 " |
| Length |
22.6" |
| Inlet flange |
ISO/CVC |
|
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