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E1550

真空焊接炉vlo20

 

Horizontal furnace for R&D

The E 1200 small batch laboratory system supports the multiple process capability needs of a low volume production with high process performance. The centrotherm design is outstanding for high performance, small footprint and low cost of ownerhip while offering a high process flexibility required for multiple applications

Atmospheric,PECVD and LPCVD processes
  • Process selectable chamber options available in 3 or 4 stack configurations
  • Advanced water cooling system guarantees no thermal interference between the different process tubes
  • Optional: automated boat loading
  • Modular component design for ease of installation and start up

 

Processes
Annealing

  • Diffusion
  • LPCVD
  • Oxidation
  • PECVD

 

 

 

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